WebChuck Temperature Display Resolution. 0.01°C . Smallest Temperature Selection Step. 0.1°C . Temperature accuracy. ±0.1 °C. Max. Voltage between Chuck Top and GND ... Temperature sensor. Pt100 1/3DIN, 4-line wired. Chuck surface plating. Nickel (gold or non-conductive available) Interfaces. RS232C, Ethernet, others on request. WebChuck Temperature Display Resolution. 0.01°C . Smallest Temperature Selection Step. 0.1°C . Temperature accuracy. ±0.1 °C. ... Temperature sensor. Pt100 1/3DIN, 4-line …
Electrostatic Chuck Technology - Entegris
Webinexpensive and durable. Because of the small sensor voltage and low noise requirements, delta-sigma analog-to-digital converters (ADCs) are ideal data converters for measuring … Weblarge temp range: High tolerances, inaccurate: Sensor applied directly to chuck. Heat conducting paste: Reliable reference measurement within specified tolerance. Messy, introduces contaminants, possibility of subjective operator bias. Temperature wafer: Mostly PT1000. High resolution, easy to use, repeatable results. Investment Intensive, Fragile, fmla california 2022 apply
Semiconductor Chuck Temperature Monitoring Fiber Optic Sensors
WebEach electrostatic chuck is divided into multiple zones, requiring multiple fiber optic temperature sensors to maximize temperature uniformity across the surface of the … OSENSA’s fiber optic sensors are robust, can be manufactured to various lengths, … OSENSA Innovations develops and manufactures fiber optic temperature … OSENSA Innovations products include high temperature fiber optic sensors, … Figure 1: Schematic overview of OSENSA’s fluorescent sensor technology. Contact … OSENSA Innovations Corp. US & Canada contact information. Fiber optic … OSENSA’s industrial fiber optic temperature sensor products boast the highest … WebSensArray Thermal Chuck Temperature measuring 7.5″ wafer 7 type “K” T/C’s: 93: SensArray Thermal Map 2 Intelligent Sensor Input System: 94: SensArray Thermal MAP … WebThis wafer comes in 2 basic version: a) with reference temperature sensor b) without reference temperature sensor (IR camera not included). The no reference version enables the characterization of thermal chuck … fmla call in number